i got a rough hypothesis of whats causing it, intel did mention that they'd gang transistors in parallel which is supported in 3d-transistors to increase current supply.
my theory is, well actually its a fact, that transistors cannot perform identically even if they're the same(see how does Astable multivibrator begin the Initial power-up), impurities makes them have delays longer or shorter than the other transistors which means ganging them wont make them operate at 100% sync.
now when operating them, if like for example 10 transistors is turned on simultaneously but in actual half of them activate earlier than the other half, this means theres 50% decrease in path or in other words theres twice the electrical resistance in contrast to them fully activated. at lower frequencies however this issue isn't so noticable, but at higher frequencies the transistor will spend more time at this "delayed" effect which has twice the electrical resistance.
its just a hypothesis =P